Concepedia

Publication | Closed Access

Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

DOI

76

Citations

7

References

2008

Year

Lutz Prager, P. Maršík, Luise Wennrich, Mikhaı̈l R. Baklanov, S. Naumov, L. Pistol, Dieter Schneider, Jürgen W. Gerlach, Patrick Verdonck, Michael R. Buchmeiser
Microelectronic Engineering

References

YearCitations

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