Patrick Verdonck

Improving mechanical robustness of ultralow-k SiOCH plasma enhanced chemical vapor deposition glasses by controlled porogen decomposition prior to UV-hardening

Adam Urbanowicz, Kris Vanstreels, Patrick Verdonck et al. · Journal of Applied Physics · 2010 · 86 citations · Full text

Materials Science, Glass-ceramic, Sicoh Glasses +13

Low temperature deposition of 2D WS₂ layers from WF₆ and H₂S precursors: impact of reducing agents

Annelies Delabie, Matty Caymax, Benjamin Groven et al. · Chemical Communications · 2015 · 79 citations

Materials Engineering, Materials Science, Chemical Engineering +13

Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS₂ from WF₆, H₂ Plasma, and H₂S

Benjamin Groven, Markus Heyne, Ankit Nalin Mehta et al. · Chemistry of Materials · 2017 · 78 citations · Full text

Engineering, Two-dimensional Materials, Transition Metal Dichalcogenides +17

Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

Lutz Prager, P. Maršík, Luise Wennrich et al. · Microelectronic Engineering · 2008 · 76 citations

Materials Science, Ultraviolet Light, Cvd-derived Low-k Material +8

Depth-profiling of elastic inhomogeneities in transparent nanoporous low-k materials by picosecond ultrasonic interferometry

Charfeddine Mechri, P. Ruello, J. M. Breteau et al. · Applied Physics Letters · 2009 · 73 citations

Optical Materials, Engineering, Thin Transparent Film +17