Concepedia

Electroplating to visualize defects in Al2O3 thin films grown using atomic layer deposition

Yadong Zhang, Jacob A. Bertrand, Ronggui Yang, Steven M. George, Y.C. Lee

Thin Solid Films · 2009 · 56 citations · 21 references

DOI

Concepts

References

21

Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates

Markus D. Groner, Jeffrey W. Elam, F. Fabreguette et al. · Thin Solid Films · 2002 · 724 citations

, , +17

Surface Chemistry for Atomic Layer Growth

Steven M. George, A. W. Ott, J. W. Klaus · The Journal of Physical Chemistry · 1996 · 676 citations

, , +17

Thin-Film Permeation-Barrier Technology for Flexible Organic Light-Emitting Devices

John S. Lewis, Michael S. Weaver · IEEE Journal of Selected Topics in Quantum Electronics · 2004 · 498 citations

, , +17

A new technique for decoration of cleavage and slip steps on ionic crystal surfaces

G. A. Bassett · Philosophical magazine · 1958 · 485 citations

, , +12

Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers

P. F. Carcia, R. Scott McLean, Michael H. Reilly et al. · Applied Physics Letters · 2006 · 429 citations

, , +17