Publication | Closed Access
A bulk micromachined vibratory lateral gyroscope fabricated with wafer bonding and deep trench etching
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Citations
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References
2000
Year
EngineeringMicromachinesVibratory Lateral GyroscopeMicrofabricationDeep TrenchMechanical EngineeringGyroscopeBiomedical EngineeringMicroactuatorInstrumentationWafer BondingMicrofluidicsMicro-electromechanical SystemMicroelectronics
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