A bulk micromachined vibratory lateral gyroscope fabricated with wafer bonding and deep trench etching

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William Clark, Roberto Horowitz, Roger T. Howe · 1996 · 206 citations · Full text

Comparison of techniques for measuring both compressive and tensile stress in thin films

B.P. van Drieënhuizen, J.F.L. Goosen, P.J. French et al. · Sensors and Actuators A Physical · 1993 · 147 citations

Materials Science, Engineering, Compression (Physics) +9

A micromachined vibrating gyroscope

Katsuhiro Tanaka, Yoichi Mochida, Masakazu Sugimoto et al. · Sensors and Actuators A Physical · 1995 · 136 citations

Vibrations, Engineering, Micromachined Vibrating Gyroscope +8

A Precision Yaw Rate Sensor in Silicon Micromachining

M. Lutz, Jiří Marek, B. Maihöfer et al. · SAE technical papers on CD-ROM/SAE technical paper series · 1998 · 128 citations

Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass

Kazusuke Maenaka, Takayuki Fujita, Y. Konishi et al. · Sensors and Actuators A Physical · 1996 · 97 citations

Vibrations, Engineering, Microfabrication +8