Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass - Concepedia

Concepedia

Publication | Closed Access

Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass

97

Citations

9

References

1996

Year

Kazusuke Maenaka, Takayuki Fujita, Y. Konishi, Muneo Maeda

Sensors and Actuators A Physical

VibrationsEngineeringMicrofabricationMechanical EngineeringGyroscopeMechanical SystemsNano Electro Mechanical SystemCantilever BeamInstrumentationSensitive Silicon GyroscopeMicro-electromechanical System

References

	Year	Citations

Page 1