Concepedia

M. Lutz

ML

11

Publications

802

Citations

10

H-Index

1994

Active since

Affiliations

Stanford University(Current)

Robert Bosch (United States)

Robert Bosch (Germany)

M. Lutz is an author at Stanford University specializing in engineering, microfabrication, and mechanical engineering.

Top concepts

EngineeringMicrofabricationMechanical EngineeringMaterial ScienceElectronic PackagingMicroelectronicsMicrofluidicsInstrumentationSensor TechnologyFlexible Electronics

Publications per year

1994–2007

11

Publications

11

Single wafer encapsulation of mems devices

Rob N. Candler, Woo‐Tae Park, G. Yama et al. · IEEE Transactions on Advanced Packaging · 2003 · 181 citations

Piezoresistive Accelerometers, Mems Devices, Engineering +17

Impact of Geometry on Thermoelastic Dissipation in Micromechanical Resonant Beams

Rob N. Candler, Amy Duwel, M. Varghese et al. · Journal of Microelectromechanical Systems · 2006 · 143 citations

Engineering, Multiscale Mechanics, Micromechanics +17

A Precision Yaw Rate Sensor in Silicon Micromachining

M. Lutz, Jiří Marek, B. Maihöfer et al. · SAE technical papers on CD-ROM/SAE technical paper series · 1998 · 128 citations

MEMS Oscillators for High Volume Commercial Applications

M. Lutz, Aaron Partridge, Pallavi Gupta et al. · TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference · 2007 · 85 citations

Advanced Packaging, Electrical Engineering, Wafer Scale Processing +15

A precision yaw rate sensor in silicon micromachining

M. Lutz, W. Golderer, J. Gerstenmeier et al. · 2002 · 66 citations

Engineering, Micromachines, Sensors +15

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