25
Publications
706
Citations
17
H-Index
1999
Active since
Guoying Wu is an author at Institute of Microelectronics specializing in engineering, microelectronics, and electrical engineering.
Top concepts
EngineeringMicroelectronicsElectrical EngineeringMicrofabricationElectronic PackagingApplied PhysicsComputer EngineeringMechanical EngineeringVlsi DesignMicrofluidics
Publications per year
1999–2023
25
25
The compatibility of ZnO piezoelectric film with micromachining process
Tao Xu, Guoying Wu, Guobing Zhang et al. · Sensors and Actuators A Physical · 2003 · 101 citations
Bulk micromachined relay with lateral contact
Zhihong Li, Dacheng Zhang, Ting Li et al. · Journal of Micromechanics and Microengineering · 2000 · 40 citations
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