A micromachined vibrating gyroscope

A micromachined comb-drive tuning fork rate gyroscope

Jonathan Bernstein, S. Cho, A. Thomas King et al. · 2002 · 281 citations

1-Mm Gyroscope, Engineering, Micromachines +15

Electrostatic parallelogram actuators

Naoto Takeshima, K.J. Gabriel, Masanori Ozaki et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 71 citations

Engineering, Mechanical Engineering, Electrostatic Force +19

Silicon resonant angular rate sensor using electromagnetic excitation and capacitive detection

Makiko Hashimoto, C. Cabuz, Kazuyuki MINAMI et al. · Journal of Micromechanics and Microengineering · 1995 · 56 citations

Applied Angular Rate, Electromagnetic Excitation, Engineering +13

A micromachined vibrating gyroscope

Katsuhiro Tanaka, Yoichi Mochida, S. Sugimoto et al. · 2005 · 39 citations

Vibrations, Engineering, Micromachined Vibrating Gyroscope +14

Piezoelectric vibratory gyroscope using flexural vibration of a triangular bar

S. Fujishima, Tomoya Nakamura, K. Fujimoto · 2002 · 27 citations

Engineering, Piezoelectric Vibratory Gyroscope, Mechanical Engineering +19