C. Cabuz

The dual diaphragm pump

C. Cabuz, William R. Herb, Eugen Cabuz et al. · 2002 · 65 citations

Engineering, Mechanical Engineering, Dual Diaphragm Pump +16

Factors enhancing the reliability of touch-mode electrostatic actuators

C. Cabuz, Eugen Cabuz, T.R. Ohnstein et al. · Sensors and Actuators A Physical · 2000 · 64 citations

Electrical Engineering, Engineering, Touch-mode Electrostatic Actuators +4

Silicon resonant angular rate sensor using electromagnetic excitation and capacitive detection

Makiko Hashimoto, C. Cabuz, Kazuyuki MINAMI et al. · Journal of Micromechanics and Microengineering · 1995 · 56 citations

Applied Angular Rate, Electromagnetic Excitation, Engineering +13

Fabrication and packaging of a resonant infrared sensor integrated in silicon

C. Cabuz, Sunao Shoji, K. Fukatsu et al. · Sensors and Actuators A Physical · 1994 · 49 citations

Photonics, Photonic Sensor, Engineering +8

Fine frequency tuning in resonant sensors

C. Cabuz, K. Fukatsu, Hiroyuki Hashimoto et al. · 2002 · 19 citations

Engineering, Mechanical Engineering, Sensor Technology +18