A micromachined comb-drive tuning fork rate gyroscope

Abstract

The development of single-crystal and polysilicon tuning fork gyroscopes of very small size and low cost using microfabrication technology is reported. These tuning fork gyroscopes are extremely rugged, inherently balanced, and easy to fabricate. For a 1-mm gyroscope, projected performance is 10 to 100 degrees /hr for bias stability and for resolution in a 60-Hz bandwidth. To date, 5000 degrees /hr in a 60 Hz bandwidth has been demonstrated. The principle of operation, projected and measured performance and fabrication of silicon, polysilicon, and nickel units and associated electronics and control issues are discussed.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>