K. Ohwada

A micromachined vibrating gyroscope

Katsuhiro Tanaka, Yoichi Mochida, Masakazu Sugimoto et al. · Sensors and Actuators A Physical · 1995 · 136 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +15

A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes

Yoichi Mochida, Masaya Tamura, K. Ohwada · Sensors and Actuators A Physical · 2000 · 109 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +16

Uniplanar MMICs and their applications

M. Muraguchi, Takeshi Hirota, Akira Minakawa et al. · IEEE Transactions on Microwave Theory and Techniques · 1988 · 93 citations

Engineering, Electrical Engineering, Microelectronics +16

Effects of interface micro structure in crystallization of ZnO thin films prepared by radio frequency sputtering

Y. Yoshino, K. Inoue, Masaru Takeuchi et al. · Vacuum · 1998 · 75 citations

Natural Sciences, Materials Engineering, Materials Science +16

A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes

Yoichi Mochida, Masaya Tamura, K. Ohwada · 1999 · 58 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +16