Effects of interface micro structure in crystallization of ZnO thin films prepared by radio frequency sputtering

References

Page 1

	Year	Citations
Characterization of ZnO piezoelectric films prepared by rf planar-magnetron sputtering Takashi Yamamoto, Tadashi Shiosaki, Akira Kawabata Journal of Applied Physics Thin Film PhysicsOptical MaterialsEngineeringThin Film Process TechnologyFerroelectric Application	1980	273
Structures and SAW properties of rf-sputtered single-crystal films of ZnO on sapphire Tsuneo Mitsuyu, Shûsuke Ono, K. Wasa Journal of Applied Physics Materials EngineeringMaterials ScienceElectrical EngineeringMaterial AnalysisSurface Acoustic Wave	1980	221
Preparation of crystallized zinc oxide films on amorphous glass substrates by pulsed laser deposition Shunichi Hayamizu, Hitoshi Tabata, Hidekazu Tanaka, Journal of Applied Physics Optical MaterialsEngineeringCrystallized ZincLaser DepositionZinc Oxide	1996	175
R.f. sputtered epitaxial ZnO films on sapphire for integrated optics E. L. Paradis, A. J. Shuskus Thin Solid Films Materials ScienceOptical MaterialsEngineeringOptical PropertiesOxide Electronics	1976	79
Optical properties of single-crystalline ZnO film smoothly chemical-vapor deposited on intermediately sputtered thin ZnO film on sapphire Tadashi Shiosaki, S. Ohnishi, Akira Kawabata Journal of Applied Physics Materials ScienceThin Zno FilmOptical MaterialsEngineeringSputter-deposited Zno Strips	1979	73
RF Diode Sputtered ZnO Transducers John D. Larson, Donald K. Winslow, L. Zitelli IEEE Transactions on Sonics and Ultrasonics Electrical EngineeringEngineeringInstrument ScienceOxide ElectronicsTransducer Principle	1972	34
Kinetics and thermodynamics of thin-film deposition by molecular beam methods. I. Adsorption and clustering of cadmium on germanium single crystals R. J. H. Voorhoeve, J. N. Carides, R. Wagner Journal of Applied Physics EngineeringCadmium AdsorptionVacuum DeviceChemistryChemical Deposition	1972	29

Page 1