Effects of interface micro structure in crystallization of ZnO thin films prepared by radio frequency sputtering

Characterization of ZnO piezoelectric films prepared by rf planar-magnetron sputtering

Takashi Yamamoto, Tadashi Shiosaki, Akira Kawabata · Journal of Applied Physics · 1980 · 273 citations

Thin Film Physics, Optical Materials, Engineering +20

Structures and SAW properties of rf-sputtered single-crystal films of ZnO on sapphire

Tsuneo Mitsuyu, Shûsuke Ono, K. Wasa · Journal of Applied Physics · 1980 · 221 citations

Materials Engineering, Materials Science, Electrical Engineering +15

Preparation of crystallized zinc oxide films on amorphous glass substrates by pulsed laser deposition

Shunichi Hayamizu, Hitoshi Tabata, Hidekazu Tanaka et al. · Journal of Applied Physics · 1996 · 175 citations

Optical Materials, Engineering, Crystallized Zinc +17

R.f. sputtered epitaxial ZnO films on sapphire for integrated optics

E. L. Paradis, A. J. Shuskus · Thin Solid Films · 1976 · 79 citations

Materials Science, Optical Materials, Engineering +8

Optical properties of single-crystalline ZnO film smoothly chemical-vapor deposited on intermediately sputtered thin ZnO film on sapphire

Tadashi Shiosaki, S. Ohnishi, Akira Kawabata · Journal of Applied Physics · 1979 · 73 citations

Materials Science, Thin Zno Film, Optical Materials +15