Journal of Applied Physics · 1980 · 221 citations · 23 references
Natural SciencesElectrical EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesThin FilmsAcoustic Wave PropagationNanostructured Electronic MaterialsOxide SemiconductorsSemiconductor Crystal GrowthThin Film Electrical PropertiesWave Propagation In StructuresAcoustic Wave FiltersCoupling CoefficientCrystalline StructureElectrical PropertiesPropagation LossSputteringSurface Acoustic Wave FiltersZinc Oxides
Single-crystal films of ZnO have been epitaxially grown on the (0001) and (011̄2) planes of sapphire by rf sputtering. Crystalline structures and electrical properties of the films were investigated. Surface acoustic wave (SAW) properties, including a phase velocity, a coupling coefficient, a propagation loss, and a temperature coefficient of delay, were measured for SAW propagating along the c-axis of the ZnO films, on the (011̄2) planes of sapphire. Availability of this structure for high-frequency SAW devices has been demonstrated by a filter with a 1050-MHz center frequency.
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Resistivity Measurements on Germanium for Transistors
L. B. Valdes · Proceedings of the IRE · 1954 · 661 citations