Comparison of techniques for measuring both compressive and tensile stress in thin films - Concepedia

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Comparison of techniques for measuring both compressive and tensile stress in thin films

147

Citations

5

References

1993

Year

B.P. van Drieënhuizen, J.F.L. Goosen, P.J. French, R.F. Wolffenbuttel

Sensors and Actuators A Physical

Materials ScienceEngineeringCompression (Physics)Applied PhysicsStressstrain AnalysisTensile StressResidual StressThin Film DevicesThin Film Process TechnologyThin FilmsMechanics Of MaterialsHigh Strain Rate

References

	Year	Citations

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