R.F. Wolffenbuttel

State-of-the-Art in Integrated Optical Microspectrometers

R.F. Wolffenbuttel · IEEE Transactions on Instrumentation and Measurement · 2004 · 216 citations

Photonic Sensor, Optical Materials, Engineering +17

MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range

R.F. Wolffenbuttel · Journal of Micromechanics and Microengineering · 2005 · 200 citations

Optical Materials, Engineering, Dimensional Downscaling +19

Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature

R.F. Wolffenbuttel, K.D. Wise · Sensors and Actuators A Physical · 1994 · 174 citations · Full text

Materials Science, Wafer Scale Processing, Engineering +6

Optimization of a low-stress silicon nitride process for surface-micromachining applications

P.J. French, P.M. Sarro, Rainer Mallée et al. · Sensors and Actuators A Physical · 1997 · 161 citations

Materials Science, Wafer Scale Processing, Engineering +7

Low-temperature intermediate Au-Si wafer bonding; eutectic or silicide bond

R.F. Wolffenbuttel · Sensors and Actuators A Physical · 1997 · 152 citations

Materials Science, Materials Engineering, Wafer Scale Processing +5