Publication | Closed Access
Optimization of a low-stress silicon nitride process for surface-micromachining applications
161
Citations
20
References
1997
Year
Materials ScienceWafer Scale ProcessingEngineeringMicromachinesMicrofabricationSemiconductor Device FabricationSurface-micromachining ApplicationsMicro-electromechanical SystemMicroelectronicsMicrostructure
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