P.M. Sarro - Concepedia

Author

P.M. Sarro

Delft University of Technology

Also Known As

P M Sarro, P. M. Sarro, P. Sarro, P.M Sarro, P.M. Sarro, PM Sarro

118

Publications

1.9K

Citations

H-Index

Concepts

All Affiliations

Delft University of Technology Istituto per il Rilevamento Elettromagnetico dell'Ambiente Brown University TU Wien

About

P.M. Sarro is an author at Delft University of Technology specializing in engineering, applied physics, and electrical engineering.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	20	33	1.7K
2	Applied Physics	12	17	946
3	Education	1	1	147
4	Biomedical Engineering	1	1	10
5	Chemical Engineering	1	1	10

P.M. Sarro

Publications

1.8K

Citations

H-Index

Page 1

	Year	Citations
Thermal sensors based on the seebeck effect A.W. van Herwaarden, P.M. Sarro Sensors and Actuators EngineeringSensorsApplied PhysicsTemperature MeasurementThermal Analysis	1986	454
Optimization of a low-stress silicon nitride process for surface-micromachining applications P.J. French, P.M. Sarro, Rainer Mallée, Sensors and Actuators A Physical Materials ScienceWafer Scale ProcessingEngineeringMicromachinesMicrofabrication	1997	161
Silicon three-axial tactile sensor Zhong Chu, P.M. Sarro, S. Middelhoek Sensors and Actuators A Physical Tactile SensingEngineeringMicrofabricationEducationHaptic Technology	1996	147
Low temperature surface passivation for silicon solar cells C. Leguijt, P. Lölgen, John W. Eikelboom, Solar Energy Materials and Solar Cells Electrical EngineeringEngineeringApplied PhysicsSilicon Solar CellsSilicon On Insulator	1996	139
Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions P.M. Sarro, D. Brida, W. van der Vlist, Sensors and Actuators A Physical Materials ScienceEngineeringMicrofabricationSilicon MicrostructuresSurface Science	2000	75
Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer R.P. van Kampen, Michael J. Vellekoop, P.M. Sarro, Sensors and Actuators A Physical Electrostatic FeedbackElectrical EngineeringEngineeringAccelerometerMechanical Systems	1994	66
Integrated-circuit-compatible design and technology of acoustic-wave-based microsensors Michael J. Vellekoop, G.W. Lubking, P.M. Sarro, Sensors and Actuators A Physical Electrical EngineeringIntegrated-circuit-compatible DesignEngineeringSensorsIntegrated Circuits	1994	64
Integrated vacuum sensor A.W. van Herwaarden, P.M. Sarro, H.C. Meijer Sensors and Actuators Vacuum SensorEngineeringSensorsSensor InterfaceSensor Design	1985	51
Continuous deep reactive ion etching of tapered via holes for three-dimensional integration R Li, Yann Lamy, W. F. A. Besling, Journal of Micromechanics and Microengineering	2008	51
Surface micromachined tuneable interferometer array Katsuhisa Aratani, P.J. French, P.M. Sarro, Sensors and Actuators A Physical EngineeringMicrofabricationInterferometryTuneable Interferometer ArrayInstrumentation	1994	50

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