P.M. Sarro

Thermal sensors based on the seebeck effect

A.W. van Herwaarden, P.M. Sarro · Sensors and Actuators · 1986 · 454 citations

Engineering, Sensors, Applied Physics +8

Optimization of a low-stress silicon nitride process for surface-micromachining applications

P.J. French, P.M. Sarro, Rainer Mallée et al. · Sensors and Actuators A Physical · 1997 · 161 citations

Materials Science, Wafer Scale Processing, Engineering +7

Silicon three-axial tactile sensor

Zhong Chu, P.M. Sarro, S. Middelhoek · Sensors and Actuators A Physical · 1996 · 147 citations

Tactile Sensing, Engineering, Microfabrication +5

Low temperature surface passivation for silicon solar cells

C. Leguijt, P. Lölgen, John W. Eikelboom et al. · Solar Energy Materials and Solar Cells · 1996 · 139 citations

Electrical Engineering, Engineering, Applied Physics +4

Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions

P.M. Sarro, D. Brida, W. van der Vlist et al. · Sensors and Actuators A Physical · 2000 · 75 citations

Materials Science, Engineering, Microfabrication +9