W. van der Vlist

Microhotplates with TiN heaters

J.F. Creemer, D. Briand, H.W. Zandbergen et al. · Sensors and Actuators A Physical · 2008 · 96 citations

Engineering, Materials Engineering, Materials Science +10

Fabrication of nanofluidic devices using glass-to-glass anodic bonding

Vladimir G. Kutchoukov, F. Laugere, W. van der Vlist et al. · Sensors and Actuators A Physical · 2004 · 77 citations

Engineering, Materials Engineering, Materials Science +14

Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions

P.M. Sarro, D. Brida, W. van der Vlist et al. · Sensors and Actuators A Physical · 2000 · 75 citations

Engineering, Materials Engineering, Materials Science +16

A silicon-silicon nitride membrane fabrication process for smart thermal sensors

P.M. Sarro, A.W. van Herwaarden, W. van der Vlist · Sensors and Actuators A Physical · 1994 · 56 citations

Engineering, Materials Engineering, Materials Science +14

Design and fabrication of infrared detector arrays for satellite attitude control

A.W. van Herwaarden, F.G. van Herwaarden, S.A. Molenaar et al. · Sensors and Actuators A Physical · 2000 · 20 citations

Natural Sciences, Aerospace Engineering, Electrical Engineering +14