A silicon-silicon nitride membrane fabrication process for smart thermal sensors

Integrated thermopile sensors

A.W. van Herwaarden, D.C. van Duyn, B.W. van Oudheusden et al. · Sensors and Actuators A Physical · 1990 · 120 citations

Integrated grating/detector array fabricated in silicon using micromachining techniques

T.A. Kwa, R.F. Wolffenbuttel · Sensors and Actuators A Physical · 1992 · 80 citations

Engineering, Electrical Engineering, Microfabrication +11

DIMES-01, a baseline BIFET process for smart sensor experimentation

Lis K. Nanver, E.J.G. Goudena, H.W. van Zeijl · Sensors and Actuators A Physical · 1993 · 42 citations

Engineering, Electrical Engineering, Systems Engineering +11

Sensor technology strategy in silicon

P.M. Sarro · Sensors and Actuators A Physical · 1992 · 41 citations

Engineering, Electrical Engineering, Materials Science +12