Integrated thermopile sensors

Thermal sensors based on the seebeck effect

A.W. van Herwaarden, P.M. Sarro · Sensors and Actuators · 1986 · 456 citations

Engineering, Materials Engineering, Materials Science +14

Silicon Cantilever Beams Fabricated by Electrochemically Controlled Etching for Sensor Applications

P.M. Sarro, A.W. van Herwaarden · Journal of The Electrochemical Society · 1986 · 67 citations

Engineering, Materials Engineering, Mechanical Engineering +17

High-sensivity 2-D flow sensor with an etched thermal isolation structure

B.W. van Oudheusden, A.W. van Herwaarden · Sensors and Actuators A Physical · 1990 · 59 citations

Engineering, Mechanical Engineering, Heat Transfer +11

An electronic wind meter based on a silicon flow sensor

B.W. van Oudheusden, Johan H. Huijsing · Sensors and Actuators A Physical · 1990 · 45 citations

Engineering, Electrical Engineering, Environmental Engineering +13

Silicon flow sensors

B.W. van Oudheusden · 1988 · 34 citations

Engineering, Mechanical Engineering, Heat Transfer +13