High-sensivity 2-D flow sensor with an etched thermal isolation structure

Silicon Cantilever Beams Fabricated by Electrochemically Controlled Etching for Sensor Applications

P.M. Sarro, A.W. van Herwaarden · Journal of The Electrochemical Society · 1986 · 67 citations

Vacuum Sensor, Electrical Engineering, Engineering +15

A monolithic gas flow sensor with polyimide as thermal insulator

G.N. Stemme · IEEE Transactions on Electron Devices · 1986 · 58 citations

Engineering, Gas Sensor, Small Size +16

Fast-response silicon flow sensor with an on-chip fluid temperature sensing element

Osamu Tabata · IEEE Transactions on Electron Devices · 1986 · 55 citations

Engineering, Flow Cell, Fluid Temperature +18

An electronic wind meter based on a silicon flow sensor

B.W. van Oudheusden, Johan H. Huijsing · Sensors and Actuators A Physical · 1990 · 45 citations

Electrical Engineering, Engineering, Sensors +9

Integrated silicon flow-direction sensor

B.W. van Oudheusden, Johan H. Huijsing · Sensors and Actuators · 1989 · 38 citations

Silicon Flow-direction Sensor, Engineering, Computer Engineering +6