Sensor technology strategy in silicon

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Surface micromachining for microsensors and microactuators

Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 255 citations

Engineering, Materials Engineering, Materials Science +17

A low-offset spinning-current hall plate

P.J.A. Munter · Sensors and Actuators A Physical · 1990 · 180 citations

Engineering, Electrical Engineering, Physics +10

Zinc Oxide Films for Acoustoelectric Device Applications

F.S. Hickernell · IEEE Transactions on Sonics and Ultrasonics · 1985 · 141 citations

Natural Sciences, Materials Engineering, Materials Science +13

Integrated thermopile sensors

A.W. van Herwaarden, D.C. van Duyn, B.W. van Oudheusden et al. · Sensors and Actuators A Physical · 1990 · 120 citations