Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions - Concepedia

Concepedia

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Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions

75

Citations

5

References

2000

Year

P.M. Sarro, D. Brida, W. van der Vlist, S. Brida

Sensors and Actuators A Physical

Materials ScienceEngineeringMicrofabricationSilicon MicrostructuresSurface ScienceApplied PhysicsSurface QualitySemiconductor Device FabricationSaturated Tmahw SolutionsSilicon On InsulatorSurface ProcessingSurfactant Solution

References

	Year	Citations

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