39
Publications
1.8K
Citations
22
H-Index
1991
Active since
Á. Merlos is an author at Centro Nacional de Microelectrónica specializing in engineering, microelectronics, and electrical engineering.
Top concepts
EngineeringMicroelectronicsElectrical EngineeringInstrumentationApplied PhysicsSensorsSensor DesignChemical EngineeringNanoelectronicsElectrochemistry
Publications per year
1991–2022
39
39
TMAH/IPA anisotropic etching characteristics
Á. Merlos, M.C. Acero, Ming Bao et al. · Sensors and Actuators A Physical · 1993 · 183 citations
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1–5 of 39