Publication | Closed Access
Compensating corner undercutting in anisotropic etching of (100) silicon
107
Citations
6
References
1989
Year
Materials EngineeringEngineeringMicrofabricationMechanical EngineeringApplied PhysicsSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsPlasma EtchingAnisotropic Etching
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