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Design optimization of stacked layer dielectrics for minimum gate leakage currents

J Zhang, J.S. Yuan, Y. Ma, A. S. Oates

Solid-State Electronics · 2000 · 27 citations · 12 references

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References

12

Generalized Formula for the Electric Tunnel Effect between Similar Electrodes Separated by a Thin Insulating Film

J.G. Simmons · Journal of Applied Physics · 1963 · 4.1K citations

, , +15

Physics of resonant tunneling. The one-dimensional double-barrier case

B. Riccò, M. Ya. Azbel · Physical review. B, Condensed matter · 1984 · 730 citations

, , +10

On tunneling in metal-oxide-silicon structures

Z. A. Weinberg · Journal of Applied Physics · 1982 · 559 citations

, , +16

Making silicon nitride film a viable gate dielectric

T.P. Ma · IEEE Transactions on Electron Devices · 1998 · 383 citations

, , +17

The impact of high-κ gate dielectrics and metal gate electrodes on sub-100 nm MOSFETs

Baolei Cheng, Min Cao, A. Inani et al. · IEEE Transactions on Electron Devices · 1999 · 299 citations

, , +17