Concepedia

Publication | Closed Access

TiO2 thin films by atomic layer deposition: a case of uneven growth at low temperature

DOI

89

Citations

11

References

1998

Year

Väino Sammelselg, A. Rosental, Aivar Tarre, Lauri Niinistö, Kari Heiskanen, K Ilmonen, Leena‐Sisko Johansson, Teet Uustare
Applied Surface Science

References

YearCitations

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