Concepedia

Low-temperature Deposition

Low-Temperature Deposition is a thin-film deposition technique that enables the growth of high-quality films at temperatures significantly below conventional processing thresholds, thereby preserving thermal sensitivity of underlying substrates and enabling integration with temperature-constrained materials and devices.

1.5K

Publications

64.6K

Citations

6.4K

Authors

1.3K

Institutions

Publications per year

2017–2026

286

Parents

Publications

1.5K

Microstructural evolution during film growth

I. Petrov, P.B. Barna, Lars Hultman et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 1.7K citations

, , +17

Low-temperature fabrication of high-performance metal oxide thin-film electronics via combustion processing

Myung‐Gil Kim, Mercouri G. Kanatzidis, Antonio Facchetti et al. · Nature Materials · 2011 · 1.2K citations

, , +16

A General Low-Temperature Route for Large-Scale Fabrication of Highly Oriented ZnO Nanorod/Nanotube Arrays

Haidong Yu, Zhongping Zhang, Ming‐Yong Han et al. · Journal of the American Chemical Society · 2005 · 483 citations

, , +16

Highly Efficient Flexible Perovskite Solar Cells Using Solution-Derived NiO<sub><i>x</i></sub> Hole Contacts

Peng Chen, Meidan Que, Yonglei Xing et al. · ACS Nano · 2016 · 472 citations

, , +17

Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma

Seitaro Matsuo, Mikiho Kiuchi · Japanese Journal of Applied Physics · 1983 · 395 citations

, , +17

1–5 of 1.5K

Authors

6.4K

  1. ML
    Markku Leskelä

    University of Helsinki, Finland

    15 publications · 878 citations

    13

    h-index

  2. MR
    Mikko Ritala

    University of Helsinki, Finland

    15 publications · 1.1K citations

    13

    h-index

  3. GN
    Gregory N. Parsons

    North Carolina State University, United States

    12 publications · 698 citations

    12

    h-index

  4. GS
    Gregory S. Girolami

    University of Illinois Urbana-Champaign, United States

    11 publications · 494 citations

    11

    h-index

  5. HF
    Hiroshi Funakubo

    Tokyo Institute of Technology, Japan

    11 publications · 388 citations

    10

    h-index

1–5 of 6.4K

Institutions

1.3K

  1. Centre National de la Recherche Scientifique

    Paris, France

    25 h-index

    197 publications

    8.2K citations

  2. Chinese Academy of Sciences

    Beijing, China

    20 h-index

    192 publications

    9K citations

  3. Seoul National University

    Seoul, South Korea

    20 h-index

    98 publications

    3.4K citations

  4. North Carolina State University

    Raleigh, United States

    17 h-index

    68 publications

    3.8K citations

  5. Tokyo Institute of Technology

    Tokyo, Japan

    17 h-index

    78 publications

    2.8K citations

  6. Yonsei University

    Seoul, South Korea

    16 h-index

    51 publications

    2.2K citations

  7. Massachusetts Institute of Technology

    Cambridge, United States

    15 h-index

    52 publications

    2.3K citations

  8. The University of Texas at Dallas

    Richardson, United States

    15 h-index

    71 publications

    1.9K citations

1–8 of 1.3K

Venues

  1. Applied Physics Letters

    108 publications · 5.7K citations

    45

    h-index

  2. Thin Solid Films

    118 publications · 5K citations

    39

    h-index

  3. Chemistry of Materials

    50 publications · 2.7K citations

    32

    h-index

  4. 30

    h-index

  5. Journal of The Electrochemical Society

    JES · 52 publications · 2.6K citations

    30

    h-index

1–5