Synthesis of oxide thin films and overlayers by atomic layer epitaxy for advanced applications

Growth of titanium dioxide thin films by atomic layer epitaxy

Mikko Ritala, Markku Leskelä, E. Nykänen et al. · Thin Solid Films · 1993 · 307 citations

Natural Sciences, Materials Engineering, Materials Science +14

Morphology and structure of TiO2 thin films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Teet Uustare et al. · Journal of Crystal Growth · 1995 · 302 citations

Natural Sciences, Materials Engineering, Materials Science +14

Titanium isopropoxide as a precursor in atomic layer epitaxy of titanium dioxide thin films

Mikko Ritala, Markku Leskelä, Lauri Niinistö et al. · Chemistry of Materials · 1993 · 295 citations

Natural Sciences, Chemistry, Materials Science +8

Sequential surface chemical reaction limited growth of high quality Al2O3 dielectrics

G. S. Higashi, Cass Fleming · Applied Physics Letters · 1989 · 234 citations

Natural Sciences, Materials Engineering, Materials Science +17

Development of crystallinity and morphology in hafnium dioxide thin films grown by atomic layer epitaxy

Mikko Ritala, Markku Leskelä, Lauri Niinistö et al. · Thin Solid Films · 1994 · 201 citations

Natural Sciences, Materials Engineering, Materials Science +14