Direct-write deposition with a focused electron beam - Concepedia

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Direct-write deposition with a focused electron beam

14

Citations

8

References

2006

Year

Markus Fischer, Heinz D. Wanzenboeck, Josef Gottsbachner, Stefan Müller, W. Brezna, M. Schramboeck, E. Bertagnolli

Microelectronic Engineering

Focused Electron BeamElectron-beam LithographyBeam LithographyApplied PhysicsElectron Optic

References

	Year	Citations

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