Concepedia
Author
Josef Gottsbachner
Also Known As
J. Gottsbachner, Josef Gottsbachner
4
Publications
14
Citations
1
H-Index
Concepts
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Direct-write deposition with a focused electron beam
Markus Fischer, Heinz D. Wanzenboeck, Josef Gottsbachner, +4
Microelectronic Engineering
Focused Electron BeamElectron-beam LithographyBeam LithographyApplied PhysicsElectron Optic
2006
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