Shashank C. Deshmukh

Investigation of SiO2 plasma enhanced chemical vapor deposition through tetraethoxysilane using attenuated total reflection Fourier transform infrared spectroscopy

Shashank C. Deshmukh, Eray S. Aydil · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 131 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low-temperature plasma enhanced chemical vapor deposition of SiO2

Shashank C. Deshmukh, Eray S. Aydil · Applied Physics Letters · 1994 · 79 citations

Natural Sciences, Materials Engineering, Materials Science +15

Investigation of low temperature SiO2 plasma enhanced chemical vapor deposition

Shashank C. Deshmukh, Eray S. Aydil · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 66 citations

Natural Sciences, Materials Engineering, Materials Science +15

Deposition of high quality YBa2Cu3O7−δ thin films over large areas by pulsed laser ablation with substrate scanning

M.F. Davis, J. Wosik, Kenneth Forster et al. · Journal of Applied Physics · 1991 · 52 citations

Natural Sciences, Materials Science, Physics +12

Factors affecting the Cl atom density in a chlorine discharge

Shashank C. Deshmukh, Demetre J. Economou · Journal of Applied Physics · 1992 · 37 citations

Natural Sciences, Chemistry, Physics +17