Demetre J. Economou

Fluid simulations of glow discharges: Effect of metastable atoms in argon

Dimitris P. Lymberopoulos, Demetre J. Economou · Journal of Applied Physics · 1993 · 350 citations

Coupled System, Engineering, Glow Discharge +21

Simulation of a direct current microplasma discharge in helium at atmospheric pressure

Qiang Wang, Demetre J. Economou, Vincent M. Donnelly · Journal of Applied Physics · 2006 · 212 citations

Dc Microplasma Discharge, Engineering, Glow Discharge +18

Pulsed plasma etching for semiconductor manufacturing

Demetre J. Economou · Journal of Physics D Applied Physics · 2014 · 199 citations

Pulsed Plasmas, Continuous Wave, Electrical Engineering +13

Two-Dimensional Self-Consistent Radio-Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference Rf Reference Cell

Dimitris P. Lymberopoulos, Demetre J. Economou · Journal of Research of the National Institute of Standards and Technology · 1995 · 154 citations · Full text

Engineering, Plasma Science, Plasma Physics +22

Realization of atomic layer etching of silicon

Satish D. Athavale, Demetre J. Economou · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 146 citations

Materials Science, Materials Engineering, Single Crystal Silicon +13