Concepedia

Satish D. Athavale

SD

5

Publications

540

Citations

5

H-Index

1995

Active since

Affiliations

University of Houston(Current)

Satish D. Athavale is an author at University of Houston specializing in engineering, surface science, and applied physics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceThin FilmsMicroelectronicsMicrofabricationElectronic MaterialsMaterials EngineeringPhysics

Publications per year

1995–1999

5

Publications

5

(Ba,Sr)TiO<sub>3</sub> dielectrics for future stacked- capacitor DRAM

David E. Kotecki, J. D. Baniecki, Haibo Shen et al. · IBM Journal of Research and Development · 1999 · 197 citations

Engineering, Emerging Memory Technology, Thin Film Process Technology +16

Realization of atomic layer etching of silicon

Satish D. Athavale, Demetre J. Economou · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 146 citations

Materials Science, Materials Engineering, Single Crystal Silicon +13

Molecular dynamics simulation of atomic layer etching of silicon

Satish D. Athavale, Demetre J. Economou · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 110 citations

Ps Time Scale, Engineering, Molecular Dynamics Simulation +19

Chemical vapor deposition of aluminum and gallium nitride thin films from metalorganic precursors

David M. Hoffman, S.P. Rangarajan, Satish D. Athavale et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 50 citations

Materials Science, Aluminium Nitride, Engineering +12

Plasma-enhanced chemical vapor deposition of silicon, germanium, and tin nitride thin films from metalorganic precursors

David M. Hoffman, S.P. Rangarajan, Satish D. Athavale et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 37 citations

Engineering, Metalorganic Precursors, Optoelectronic Devices +16

Rows per page

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