Concepedia

Dimitris P. Lymberopoulos

DP

13

Publications

1.1K

Citations

13

H-Index

1993

Active since

Affiliations

University of Houston(Current)

Applied Materials (United States)

Samsung (South Korea)

Dimitris P. Lymberopoulos is an author at University of Houston specializing in engineering, plasma physics, and plasma simulation.

Top concepts

EngineeringPlasma PhysicsPlasma SimulationPhysicsApplied PhysicsElectrical EngineeringPlasma ScienceTransport PhenomenaPlasma TheoryPlasma Confinement

Publications per year

1993–2009

13

Publications

13

Fluid simulations of glow discharges: Effect of metastable atoms in argon

Dimitris P. Lymberopoulos, Demetre J. Economou · Journal of Applied Physics · 1993 · 350 citations

Coupled System, Engineering, Glow Discharge +21

Two-Dimensional Self-Consistent Radio-Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference Rf Reference Cell

Dimitris P. Lymberopoulos, Demetre J. Economou · Journal of Research of the National Institute of Standards and Technology · 1995 · 154 citations · Full text

Engineering, Plasma Science, Plasma Physics +22

Inductively Coupled Pulsed Plasmas in the Presence of Synchronous Pulsed Substrate Bias for Robust, Reliable, and Fine Conductor Etching

S. Banna, Ankur Agarwal, K. Tokashiki et al. · IEEE Transactions on Plasma Science · 2009 · 95 citations

Engineering, Plasma Physics, Plasma Processing +17

Modeling and simulation of glow discharge plasma reactors

Dimitris P. Lymberopoulos, Demetre J. Economou · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 79 citations

Electrical Engineering, Engineering, Glow Discharge +15

Two-dimensional simulation of polysilicon etching with chlorine in a high density plasma reactor

Dimitris P. Lymberopoulos, Demetre J. Economou · IEEE Transactions on Plasma Science · 1995 · 73 citations

Engineering, Radial Uniformity, Chemical Engineering +17

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