Concepedia

Ankur Agarwal

AA

Statistics

Publications

27

Citations

1.4K

H-Index

19

Active since

1993

Affiliations

Applied Materials (United States)(Current)

University of Houston

University of Illinois Urbana-Champaign

Samsung (South Korea)

Iowa State University

Ankur Agarwal is an author at Applied Materials (United States) specializing in natural sciences, plasma physics, and plasma simulation.

Publications per year

1993–2023

27

Publications

27

Finned zeolite catalysts

Heng Dai, Yufeng Shen, Taimin Yang et al. · Nature Materials · 2020 · 212 citations

Plasma atomic layer etching using conventional plasma equipment

Ankur Agarwal, Mark J. Kushner · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2008 · 169 citations

Engineering, Materials Engineering, Materials Science +17

Thermal desorption of ultraviolet–ozone oxidized Ge(001) for substrate cleaning

X.-J. Zhang, G. Xue, Ankur Agarwal et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 133 citations

Natural Sciences, Materials Engineering, Materials Science +15

Inductively Coupled Pulsed Plasmas in the Presence of Synchronous Pulsed Substrate Bias for Robust, Reliable, and Fine Conductor Etching

S. Banna, Ankur Agarwal, K. Tokashiki et al. · IEEE Transactions on Plasma Science · 2009 · 103 citations

Natural Sciences, Electrical Engineering, Physics +17

Effect of simultaneous source and bias pulsing in inductively coupled plasma etching

Ankur Agarwal, Phillip J. Stout, S. Banna et al. · Journal of Applied Physics · 2009 · 61 citations

Natural Sciences, Materials Engineering, Physics +16

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