Concepedia
Statistics
Publications
27
Citations
1.4K
H-Index
19
Active since
1993
Affiliations
Applied Materials (United States)(Current)
University of Houston
University of Illinois Urbana-Champaign
Samsung (South Korea)
Iowa State University
Ankur Agarwal is an author at Applied Materials (United States) specializing in natural sciences, plasma physics, and plasma simulation.
Publications per year
1993–2023
Finned zeolite catalysts
Heng Dai, Yufeng Shen, Taimin Yang et al. · Nature Materials · 2020 · 212 citations
Plasma atomic layer etching using conventional plasma equipment
Ankur Agarwal, Mark J. Kushner · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2008 · 169 citations
Engineering, Materials Engineering, Materials Science +17
Thermal desorption of ultraviolet–ozone oxidized Ge(001) for substrate cleaning
X.-J. Zhang, G. Xue, Ankur Agarwal et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 133 citations
Natural Sciences, Materials Engineering, Materials Science +15
Inductively Coupled Pulsed Plasmas in the Presence of Synchronous Pulsed Substrate Bias for Robust, Reliable, and Fine Conductor Etching
S. Banna, Ankur Agarwal, K. Tokashiki et al. · IEEE Transactions on Plasma Science · 2009 · 103 citations
Natural Sciences, Electrical Engineering, Physics +17
Effect of simultaneous source and bias pulsing in inductively coupled plasma etching
Ankur Agarwal, Phillip J. Stout, S. Banna et al. · Journal of Applied Physics · 2009 · 61 citations
Natural Sciences, Materials Engineering, Physics +16
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