9
Publications
233
Citations
9
H-Index
1990
Active since
K. Reimer is an author at Fraunhofer Institute for Silicon Technology specializing in engineering, microfabrication, and instrumentation.
Top concepts
EngineeringMicrofabricationInstrumentationMechanical EngineeringMedicineEducationCalibrationMeasurementMechatronicsMicrofluidics
Publications per year
1990–2010
9
9
Resolution limits in electron-beam induced tungsten deposition
K. T. Kohlmann-von Platen, J. Chlebek, K. Reimer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 81 citations
Materials Science, Electron-beam Induced Tungsten, Electron-beam Induced Deposition +14
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