Concepedia

Frank Senger

FS

Statistics

Publications

12

Citations

322

H-Index

11

Active since

2007

Affiliations

Fraunhofer Institute for Silicon Technology(Current)

VTT Technical Research Centre of Finland

Frank Senger is an author at Fraunhofer Institute for Silicon Technology specializing in microfabrication, engineering, and instrumentation.

Top concepts

EngineeringMicrofabricationInstrumentationMicroelectronicsElectrical EngineeringMechanical EngineeringMechatronicsOptical PropertiesApplied PhysicsGraded-reflectivity Mirrors

Publications per year

2007–2021

12

Publications

12

Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

Ulrich Hofmann, Mika Aikio, Joachim Janes et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 55 citations

Engineering, Optic Design, Optical Testing +18

Biaxial resonant 7mm-MEMS mirror for automotive LIDAR application

Ulrich Hofmann, Frank Senger, Frerk Soerensen et al. · 2012 · 46 citations

Engineering, Microfabrication, Optical Properties +12

Laser Beam Scanning Based AR-Display Applying Resonant 2D MEMS Mirrors

Oleg Petrak, Fabian Schwarz, Leon Pohl et al. · 2021 · 37 citations

Adaptive Optic, Micro Display, Engineering +13

Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

Fabian Schwarz, Frank Senger, Jörg Albers et al. · 2020 · 29 citations

AlN-based piezoelectric micropower generator for low ambient vibration energy harvesting

Fabian Stoppel, Christian Schröder, Frank Senger et al. · Procedia Engineering · 2011 · 27 citations · Full text

Transverse Piezoelectric Effect, Electrical Engineering, Energy Harvesting +15

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