Joachim Janes

Statistics

Publications

Citations

685

H-Index

Active since

1982

Affiliations

Fraunhofer Institute for Silicon Technology(Current)

Fraunhofer Institute for Microengineering and Microsystems

VTT Technical Research Centre of Finland

Joachim Janes is an author at Fraunhofer Institute for Silicon Technology specializing in engineering, microelectromechanical systems, and microfabrication.

Publications per year

1982–2015

Publications

High-Q MEMS Resonators for Laser Beam Scanning Displays

Ulrich Hofmann, Joachim Janes, Hans-Joachim Quenzer · Micromachines · 2012 · 153 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

Ulrich Hofmann, Mika Aikio, Joachim Janes et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 57 citations

Engineering, Automotive Engineering, Mechanical Engineering +17

Biaxial resonant 7mm-MEMS mirror for automotive LIDAR application

Ulrich Hofmann, Frank Senger, Frerk Soerensen et al. · 2012 · 48 citations

Engineering, Automotive Engineering, Mechanical Engineering +16

Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays

Ulrich Hofmann, Marten Oldsen, Hans-Joachim Quenzer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 43 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +17

Energy-resolved angular distributions of O+ ions at the radio-frequency-powered electrode in reactive ion etching

Joachim Janes, Christoph Huth · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 30 citations

Natural Sciences, Chemistry, Physics +12

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