P. Merz - Concepedia

Author

P. Merz

Also Known As

P. Merz, Peter Merz, Peter W. Merz

Publications

158

Citations

H-Index

Concepts

All Affiliations

P. Merz is an author at Fraunhofer Institute for Silicon Technology specializing in engineering, mechanical engineering, and microfabrication.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	130
2	Education	2	2	40
3	Applied Physics	1	1	11
4	Chemical Engineering	1	1	21
5	Computer Engineering	1	1	15

P. Merz

Publications

130

Citations

H-Index

Page 1

	Year	Citations
A novel micromachining technology for structuring borosilicate glass substrates P. Merz, Hans-Joachim Quenzer, H. Bernt, EngineeringOptical GlassMechanical EngineeringNovel Micromachining TechnologyMicro-optical Component	2003	58
Impact of Si DRIE on Vibratory MEMS Gyroscope Performance P. Merz, W. Pilz, Frank Senger, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference EngineeringQuadrature ErrorMeasurementMicrofabricationCalibration	2007	25
Deep electrochemical trench etching with organic hydrofluoric electrolytes M. Christophersen, P. Merz, J. Quenzer, Sensors and Actuators A Physical Deep Electrochemical TrenchChemical EngineeringElectrical EngineeringEngineeringOrganic Electrochemistry	2001	21
Combined MEMS inertial sensors for IMU applications P. Merz, K. Reimer, O. Schwarzelbach, EngineeringMeasurementMechanical EngineeringAccelerometerEducation	2010	15
<title>Progress in gray-tone lithography and replication techniques for different materials</title> Klaus Reimer, Rainer Engelke, Ulrich Hofmann, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringMicro-optical ComponentBeam LithographyMaterials Fabrication	1999	11

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