P. Merz

A novel micromachining technology for structuring borosilicate glass substrates

P. Merz, Hans-Joachim Quenzer, H. Bernt et al. · 2003 · 58 citations

Engineering, Optical Glass, Mechanical Engineering +16

Impact of Si DRIE on Vibratory MEMS Gyroscope Performance

P. Merz, W. Pilz, Frank Senger et al. · TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference · 2007 · 25 citations

Engineering, Quadrature Error, Measurement +13

Deep electrochemical trench etching with organic hydrofluoric electrolytes

M. Christophersen, P. Merz, J. Quenzer et al. · Sensors and Actuators A Physical · 2001 · 21 citations

Deep Electrochemical Trench, Chemical Engineering, Electrical Engineering +6

Combined MEMS inertial sensors for IMU applications

P. Merz, K. Reimer, O. Schwarzelbach et al. · 2010 · 15 citations

Engineering, Measurement, Mechanical Engineering +16

<title>Progress in gray-tone lithography and replication techniques for different materials</title>

Klaus Reimer, Rainer Engelke, Ulrich Hofmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 11 citations

Optical Materials, Engineering, Micro-optical Component +20