Concepedia

Author

W. Pilz

Helmholtz-Zentrum Dresden-Rossendorf

Also Known As

Pilz, W., Pilz, Wolfgang, W PILZ, W Pilz, W. PILZ, W. Pilz, WOLFGANG PILZ, Wolfgang Pilz

240

Publications

1.5K

Citations

19

H-Index

74

Concepts

All Affiliations

Helmholtz-Zentrum Dresden-RossendorfFraunhofer Institute for Silicon TechnologyFZI Research Center for Information TechnologyFraunhofer Institute for Microengineering and MicrosystemsMax Planck Institute for Plasma Physics
WP

About

W. Pilz is an author at Helmholtz-Zentrum Dresden-Rossendorf specializing in engineering, applied physics, and materials science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

14

23

478

2

Natural Sciences

4

4

83

3

Education

1

1

25

4

Health Sciences

1

1

12

5

Medicine

1

1

10

W. Pilz

×

30

Publications

597

Citations

16

H-Index

YearCitations

Microfabrication of complex surface topographies using grey-tone lithography

B. Wagner, Hans-Joachim Quenzer, Wolfgang Henke,

Sensors and Actuators A Physical

1995

73

Amorphous solid foam structures on germanium by heavy ion irradiation

L. Bischoff, W. Pilz, Bernd Schmidt

Applied Physics A

2011

40

Tritium in plasma facing components

R.‐D. Penzhorn, J.P. Coad, N. Bekris,

Fusion Engineering and Design

2001

36

Random and channeling stopping powers and charge-state distributions in silicon for 0.2–1.2 MeV/u positive heavy ions

Weilin Jiang, R. Grötzschel, W. Pilz,

Physical review. B, Condensed matter

1999

33

Self-organization of Ge nanopattern under erosion with heavy Bi monomer and cluster ions

L. Bischoff, K.‐H. Heinig, Bernd Schmidt,

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

2011

31

Impact of Si DRIE on Vibratory MEMS Gyroscope Performance

P. Merz, W. Pilz, Frank Senger,

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

2007

25

Comparison of bismuth emitting liquid metal ion sources

L. Bischoff, W. Pilz, Paul Mazarov,

Applied Physics A

2010

24

Neutron-neutron effective range from quasifree scattering 2H(n, nn)p at 25 MeV

H. Guratzsch, B. Kühn, H. Kumpf,

Nuclear Physics A

1980

22

One-level gray-tone design — Mask data preparation and pattern transfer

K. Reimer, Wolfgang Henke, Hans-Joachim Quenzer,

Microelectronic Engineering

1996

20

Micro-optical elements fabricated by electron-beam lithography and dry etching technique using top conductive coatings

R. Steingrüber, M. Ferstl, W. Pilz

Microelectronic Engineering

2001

19

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