Microfabrication of complex surface topographies using grey-tone lithography

One-step 3D shaping using a gray-tone mask for optical and microelectronic applications

Y. Oppliger, Pierre Sixt, J. M. Stauffer et al. · Microelectronic Engineering · 1994 · 115 citations

Engineering, Electrical Engineering, Manufacturing Engineering +9

Fabrication of 3-dimensionally shaped Si diaphragm dynamic focusing mirror

Mori Hisanaga, Tsukasa Koumura, Takashi Hattori · 2002 · 39 citations

Engineering, Materials Engineering, Materials Science +15

Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces

Wolfgang Henke, W Hoppe, Hans-Joachim Quenzer et al. · 1994 · 29 citations

Engineering, Electrical Engineering, Manufacturing Engineering +16

Simulation of lithographic images and resist profiles

Wolfgang Henke, G. Czech · Microelectronic Engineering · 1990 · 28 citations

Engineering, Electrical Engineering, Materials Science +14