Y. Oppliger

Statistics

Publications

Citations

246

H-Index

Active since

1991

Affiliations

Swiss Center for Electronics and Microtechnology (Switzerland)(Current)

Y. Oppliger is an author at Swiss Center for Electronics and Microtechnology (Switzerland) specializing in engineering, microfabrication, and thin film lithography.

Publications per year

1991–1994

Publications

One-step 3D shaping using a gray-tone mask for optical and microelectronic applications

Y. Oppliger, Pierre Sixt, J. M. Stauffer et al. · Microelectronic Engineering · 1994 · 115 citations

Engineering, Electrical Engineering, Manufacturing Engineering +9

Nanometer thin-film Ni-NiO-Ni diodes for 30 THz radiation

Ingrid Wilke, Y. Oppliger, W. Herrmann et al. · Applied Physics A · 1994 · 85 citations

Engineering, Materials Engineering, Materials Science +13

Electron beam writing of continuous resist profiles for optical applications

J. M. Stauffer, Y. Oppliger, P. Regnault et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 25 citations

Engineering, Materials Engineering, Materials Science +14

Mix and match lithography for 0.1 μm MOSFET fabrication

J.P. Miéville, J. Barrier, Zhan Shi et al. · Microelectronic Engineering · 1991 · 21 citations

Engineering, Electrical Engineering, Microelectronics +13

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