Concepedia

Micro-metrology

Micro-Metrology is a specialized branch of industrial metrology concerned with the science of measurement at microscopic scales, distinguished by its focus on dimensional, geometrical, and surface characterization of micro-engineered components and structures with high precision and traceability.

406

Publications

16K

Citations

1.6K

Authors

463

Institutions

Publications per year

2017–2026

72

Parents

Publications

406

Dimensional Micro and Nano Metrology

Hans Nørgaard Hansen, K. Carneiro, Han Haitjema et al. · CIRP Annals · 2006 · 326 citations

, , +14

The international vocabulary of basic and general terms in metrology

Pat Clifford · Measurement · 1985 · 319 citations

, , +12

Optical Methods for Dimensional Metrology in Production Engineering

H. Schwenke, Ulrich Neuschaefer-Rube, Tilo Pfeifer et al. · CIRP Annals · 2002 · 299 citations

, , +16

The use of materials patterned on a nano- and micro-metric scale in cellular engineering

C.D.W. Wilkinson, Mathis O. Riehle, Mairead A. Wood et al. · Materials Science and Engineering C · 2002 · 281 citations

, , +14

International Vocabulary of Metrology–Basic and General Concepts and Associated Terms

Chemistry International · 2008 · 263 citations · Full text

, , +12

1–5 of 406

Authors

1.6K

  1. GT
    Guido Tosello

    Technical University of Denmark, Denmark

    6 publications · 186 citations

    6

    h-index

  2. PL
    Peter L. Privalov

    Johns Hopkins University, United States

    5 publications · 612 citations

    5

    h-index

  3. EM
    Eberhard Manske

    Technische Universität Ilmenau, Germany

    5 publications · 277 citations

    5

    h-index

  4. IW
    Ingemar Wadsö

    Lund University, Sweden

    4 publications · 131 citations

    4

    h-index

  5. JS
    Jörg Seewig

    University of Kaiserslautern, Germany

    4 publications · 61 citations

    4

    h-index

1–5 of 1.6K

Institutions

463

  1. Physikalisch-Technische Bundesanstalt

    Braunschweig, Germany

    14 h-index

    85 publications

    3.1K citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    11 h-index

    30 publications

    1.5K citations

  3. National Institute of Standards and Technology

    Gaithersburg, United States

    11 h-index

    47 publications

    1.5K citations

  4. Technical University of Denmark

    Kongens Lyngby, Denmark

    9 h-index

    18 publications

    1.2K citations

  5. University of Padua

    Padua, Italy

    7 h-index

    13 publications

    472 citations

  6. Technische Universität Ilmenau

    Ilmenau, Germany

    6 h-index

    18 publications

    794 citations

  7. Technische Universität Braunschweig

    Braunschweig, Germany

    6 h-index

    14 publications

    288 citations

  8. ETH Zurich

    Zurich, Switzerland

    5 h-index

    9 publications

    591 citations

1–8 of 463

Venues

  1. Measurement Science and Technology

    33 publications · 1.3K citations

    21

    h-index

  2. 14

    h-index

  3. Precision Engineering

    14 publications · 505 citations

    12

    h-index

  4. CIRP Annals

    13 publications · 1.3K citations

    12

    h-index

  5. Measurement

    7 publications · 479 citations

    7

    h-index

1–5