Concepedia

Tsukasa Koumura

TK

Statistics

Publications

1

Citations

39

H-Index

1

Active since

2002

Tsukasa Koumura is an author specializing in etching processes, dry etching, and microfabrication.

Publications per year

2002–2002

1

Publications

1

Fabrication of 3-dimensionally shaped Si diaphragm dynamic focusing mirror

Mori Hisanaga, Tsukasa Koumura, Takashi Hattori · 2002 · 39 citations

Engineering, Materials Engineering, Materials Science +15

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