Concepedia

Author

Klaus Reimer

Fraunhofer Institute for Silicon Technology

Also Known As

Klaus Donadel Costa Reimer, Klaus Reimer

16

Publications

147

Citations

6

H-Index

32

Concepts

All Affiliations

Fraunhofer Institute for Silicon Technology
KR

About

Klaus Reimer is an author at Fraunhofer Institute for Silicon Technology specializing in engineering, microfabrication, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

5

5

121

2

Applied Physics

4

4

74

3

Natural Sciences

1

1

47

4

Biomedical Engineering

1

1

24

5

Computer Engineering

1

1

47

Klaus Reimer

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5

Publications

121

Citations

5

H-Index

YearCitations

<title>Micro-optic fabrication using one-level gray-tone lithography</title>

Klaus Reimer, Hans Joachim Quenzer, M. Juerss,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

1997

47

Adhesion-Inhibited Surfaces. Coated and Uncoated Interdigitated Electrode Arrays in the Micrometer and Submicrometer Range

Thomas Schnelle, Torsten Müller, Andreas Voigt,

Langmuir

1996

24

Projection mask-less lithography (PML2): First results from the multi beam blanking demonstrator

Stefan Eder-Kapl, E. Haugeneder, H. Langfischer,

Microelectronic Engineering

2006

22

<title>Fabrication of microrelief surfaces using a one-step lithography process</title>

Klaus Reimer, Ulrich Hofmann, M. Juerss,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

1997

17

<title>Progress in gray-tone lithography and replication techniques for different materials</title>

Klaus Reimer, Rainer Engelke, Ulrich Hofmann,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

1999

11

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