Projection mask-less lithography (PML2): First results from the multi beam blanking demonstrator - Concepedia

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Projection mask-less lithography (PML2): First results from the multi beam blanking demonstrator

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2006

Year

Stefan Eder-Kapl, E. Haugeneder, H. Langfischer, Klaus Reimer, J. Eichholz, Martin Witt, Hans-Joachim Doering, Joachim Heinitz, Christoph Brandstaetter

Microelectronic Engineering

EngineeringBeam LithographyElectron-beam LithographyMicroscopyMicrofabricationTarget FabricationApplied PhysicsMicroelectronicsProjection Mask-less LithographyOptoelectronicsNanolithography MethodFirst Results

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