Concepedia
Statistics
Publications
4
Citations
146
H-Index
Active since
2002
Affiliations
TU Wien(Current)
IMS Nanofabrication (Austria)
H. Langfischer is an author at TU Wien specializing in materials science, engineering, and nanotechnology.
Publications per year
2002–2006
Simulation of ion beam direct structuring for 3D nanoimprint template fabrication
Elmar Platzgummer, A. Biedermann, H. Langfischer et al. · Microelectronic Engineering · 2006 · 46 citations
Engineering, Materials Engineering, Materials Science +13
Focused ion beam induced surface amorphization and sputter processes
B. Basnar, Alois Lugstein, Heinz D. Wanzenboeck et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 39 citations
Natural Sciences, Materials Science, Physics +17
Evolution of tungsten film deposition induced by focused ion beam
H. Langfischer, B. Basnar, Herbert Hutter et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 39 citations
Natural Sciences, Materials Engineering, Materials Science +16
Projection mask-less lithography (PML2): First results from the multi beam blanking demonstrator
Stefan Eder-Kapl, E. Haugeneder, H. Langfischer et al. · Microelectronic Engineering · 2006 · 22 citations
Engineering, Electrical Engineering, Manufacturing Engineering +5
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