Concepedia

H. Langfischer

HL

Statistics

Publications

4

Citations

146

H-Index

4

Active since

2002

Affiliations

TU Wien(Current)

IMS Nanofabrication (Austria)

H. Langfischer is an author at TU Wien specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicrofabricationPhysicsMicroscopyMicrostructureNanofabricationSurface ScienceMicroelectronics

Publications per year

2002–2006

4

Publications

4

Simulation of ion beam direct structuring for 3D nanoimprint template fabrication

Elmar Platzgummer, A. Biedermann, H. Langfischer et al. · Microelectronic Engineering · 2006 · 46 citations

Materials Science, Engineering, Electron-beam Lithography +11

Focused ion beam induced surface amorphization and sputter processes

B. Basnar, Alois Lugstein, Heinz D. Wanzenboeck et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 39 citations

Engineering, Microscopy, Single Spot +17

Evolution of tungsten film deposition induced by focused ion beam

H. Langfischer, B. Basnar, Herbert Hutter et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 39 citations

Materials Science, Tungsten Layer, Ion Implantation +13

Projection mask-less lithography (PML2): First results from the multi beam blanking demonstrator

Stefan Eder-Kapl, E. Haugeneder, H. Langfischer et al. · Microelectronic Engineering · 2006 · 22 citations

Engineering, Beam Lithography, Electron-beam Lithography +9

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