Elmar Platzgummer - Concepedia

Author

Elmar Platzgummer

IMS Nanofabrication (Austria)

Also Known As

E Platzgummer, E. PLATZGUMMER, E. Platzgummer, Elmar Platzgummer

Publications

1.3K

Citations

H-Index

Concepts

All Affiliations

IMS Nanofabrication (Austria)TU Wien Osnabrück University Institut für Mikroelektronik Stuttgart Fraunhofer Institute for Silicon Technology

About

Elmar Platzgummer is an author at IMS Nanofabrication (Austria) specializing in engineering, applied physics, and materials science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	17	34	966
2	Applied Physics	16	25	753
3	Natural Sciences	4	4	79
4	Medicine	1	1	33
5	Social Sciences	1	1	11

Elmar Platzgummer

Publications

1.2K

Citations

H-Index

Page 1

	Year	Citations
Submonolayer growth of Pb on Cu( 111): surface alloying and de-alloying C. Nagl, O. Haller, Elmar Platzgummer, Surface Science Materials ScienceMaterials EngineeringEngineeringSuperalloySurface Science	1994	163
Surface alloying and superstructures of Pb on Cu(100) C. Nagl, Elmar Platzgummer, O. Haller, Surface Science Materials ScienceMaterials EngineeringEngineeringCorrosionSurface Science	1995	102
UV-NIL with working stamps made from Ormostamp M. Mühlberger, Iris Bergmair, Anna Klukowska, Microelectronic Engineering Optical EngineeringUv-vis SpectroscopyPhotochemistry	2008	60
Temperature-dependent segregation on Pt25Rh75(111) and (100) Elmar Platzgummer, Michael B. Sporn, R. Koller, Surface Science Materials ScienceMaterial AnalysisEngineeringCondensed Matter PhysicsApplied Physics	1999	60
MBMW-101: World's 1st high-throughput multi-beam mask writer Christof Klein, Elmar Platzgummer Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2016	48
Direct Observation of a New Growth Mode: Subsurface Island Growth of Cu on Pb(111) C. Nagl, Elmar Platzgummer, Michael Schmid, Physical Review Letters Materials ScienceCu IslandsSurface CharacterizationEngineeringTunneling Microscopy	1995	46
Simulation of ion beam direct structuring for 3D nanoimprint template fabrication Elmar Platzgummer, A. Biedermann, H. Langfischer, Microelectronic Engineering Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabrication	2006	46
Chemical ordering and reconstruction of Pt25Co75(100): an LEED/STM study Yves Gauthier, P. Dolle, R. Baudoing-Savois, Surface Science Inorganic ChemistryStructure ElucidationChemical OrderingChemistry	1998	46
Electron multibeam technology for mask and wafer writing at 0.1 nm address grid Elmar Platzgummer, Christof Klein, Hans Loeschner Journal of Micro/Nanolithography MEMS and MOEMS EngineeringElectron-beam LithographyMicroscopyIntegrated CircuitsWafer Scale Processing	2013	45
Oxygen-Induced Vacancy Formation on a Metal Surface Michael Schmid, G. Leonardelli, Michael B. Sporn, Physical Review Letters Materials ScienceOxygen-covered CrEngineeringPhysicsTunneling Microscopy	1999	34

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