Concepedia

Publication | Closed Access

Simulation of ion beam direct structuring for 3D nanoimprint template fabrication

DOI

46

Citations

1

References

2006

Year

Elmar Platzgummer, A. Biedermann, H. Langfischer, Stefan Eder-Kapl, Marco Kuemmel, S. Cernusca, Hans Loeschner, C. Lehrer, L. Frey, Alois Lugstein,
Microelectronic Engineering

References

YearCitations

Page 1